| Autor: |
Huan Fei Wen, Tao Pei, Yu Wang, Yuchong Jin, Ding Wang, Zhonghao Li, Hao Guo, Zongmin Ma, Jun Tang, Jun Liu |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Advanced Devices & Instrumentation, Vol 5 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2767-9713 |
| DOI: |
10.34133/adi.0055 |
| Popis: |
The rapid development of chip manufacturing technology has increased the demand for precise characterization techniques. The characterization technique of the physical field on the surface of a chip is crucial for analyzing chip failures and diagnosing faults. In this review, the latest advancements based on different measurement mechanisms are analyzed and summarized for the electromagnetic field characterization of the chip surfaces. In addition, their advantages and limitations are discussed. Finally, prospects for future development are presented. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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