Solving the Mask Data Preparation Scheduling Problem Using Meta-Heuristics

Autor: Kuo-Ching Ying, Shih-Wei Lin, Chien-Yi Huang, Memphis Liu, Chia-Tien Lin
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: IEEE Access, Vol 7, Pp 24192-24203 (2019)
Druh dokumentu: article
ISSN: 2169-3536
DOI: 10.1109/ACCESS.2019.2899601
Popis: Mask data preparation (MDP) is a part of the mask data process for fabricating semiconductors, and its importance has commonly been neglected. This paper proposes an integer linear programming model and two meta-heuristics, a genetic algorithm (GA) and simulated annealing (SA), for solving the MDP scheduling problem (MDPSP). The proposed meta-heuristics are empirically evaluated using 768 simulation instances of MDPSP based on the characteristics of a real technology company and compared with the most commonly used first-come, first-served method. The experimental results reveal that the proposed GA and SA algorithms can critically improve the manufacturing schedule for semiconductor factories.
Databáze: Directory of Open Access Journals