Autor: |
Kuo-Ching Ying, Shih-Wei Lin, Chien-Yi Huang, Memphis Liu, Chia-Tien Lin |
Jazyk: |
angličtina |
Rok vydání: |
2019 |
Předmět: |
|
Zdroj: |
IEEE Access, Vol 7, Pp 24192-24203 (2019) |
Druh dokumentu: |
article |
ISSN: |
2169-3536 |
DOI: |
10.1109/ACCESS.2019.2899601 |
Popis: |
Mask data preparation (MDP) is a part of the mask data process for fabricating semiconductors, and its importance has commonly been neglected. This paper proposes an integer linear programming model and two meta-heuristics, a genetic algorithm (GA) and simulated annealing (SA), for solving the MDP scheduling problem (MDPSP). The proposed meta-heuristics are empirically evaluated using 768 simulation instances of MDPSP based on the characteristics of a real technology company and compared with the most commonly used first-come, first-served method. The experimental results reveal that the proposed GA and SA algorithms can critically improve the manufacturing schedule for semiconductor factories. |
Databáze: |
Directory of Open Access Journals |
Externí odkaz: |
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