Performance Recovery of Silicon-Avalanche- Photodiode Electron Detector by Low-Temperature Annealing

Autor: Taizo Kawauchi, Shunji Kishimoto, Katsuyuki Fukutani
Jazyk: angličtina
Rok vydání: 2013
Předmět:
Zdroj: IEEE Journal of the Electron Devices Society, Vol 1, Iss 8, Pp 162-165 (2013)
Druh dokumentu: article
ISSN: 2168-6734
DOI: 10.1109/JEDS.2013.2277868
Popis: We report that the silicon avalanche photodiode (APD) for electron detection almost fully recovers from the damage caused by electron irradiation by annealing. With the electron irradiation at an energy of 8 keV, a prominent increase of the non-amplified component of the dark current was observed, and the gain and energy resolution for APD were significantly lowered. Upon annealing at 500 K for 10 h, the dark current was reduced and the gain and energy resolution were recovered. We also show that the dark current of APD depends on the material of the surface protection layer. The origin of the degradation and recovery is discussed.
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