| Autor: |
Kapil Debnath, Ali Z Khokhar, Stuart A Boden, Hideo Arimoto, Swe Zin Oo, Harold M H Chong, Graham Trevor Reed, Shinichi Saito |
| Jazyk: |
angličtina |
| Rok vydání: |
2016 |
| Předmět: |
|
| Zdroj: |
Frontiers in Materials, Vol 3 (2016) |
| Druh dokumentu: |
article |
| ISSN: |
2296-8016 |
| DOI: |
10.3389/fmats.2016.00051 |
| Popis: |
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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