Combining Nanofocused X-Rays with Electrical Measurements at the NanoMAX Beamline

Autor: Lert Chayanun, Susanna Hammarberg, Hanna Dierks, Gaute Otnes, Alexander Björling, Magnus T Borgström, Jesper Wallentin
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: Crystals, Vol 9, Iss 8, p 432 (2019)
Druh dokumentu: article
ISSN: 2073-4352
DOI: 10.3390/cryst9080432
Popis: The advent of nanofocused X-ray beams has allowed the study of single nanocrystals and complete nanoscale devices in a nondestructive manner, using techniques such as scanning transmission X-ray microscopy (STXM), X-ray fluorescence (XRF) and X-ray diffraction (XRD). Further insight into semiconductor devices can be achieved by combining these techniques with simultaneous electrical measurements. Here, we present a system for electrical biasing and current measurement of single nanostructure devices, which has been developed for the NanoMAX beamline at the fourth-generation synchrotron, MAX IV, Sweden. The system was tested on single InP nanowire devices. The mechanical stability was sufficient to collect scanning XRD and XRF maps with a 50 nm diameter focus. The dark noise of the current measurement system was about 3 fA, which allowed fly scan measurements of X-ray beam induced current (XBIC) in single nanowire devices.
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