Rapid, noncontact, sensitive, and semiquantitative characterization of buffered hydrogen-fluoride-treated silicon wafer surfaces by terahertz emission spectroscopy

Autor: Dongxun Yang, Abdul Mannan, Fumikazu Murakami, Masayoshi Tonouchi
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Light: Science & Applications, Vol 11, Iss 1, Pp 1-12 (2022)
Druh dokumentu: article
ISSN: 2047-7538
DOI: 10.1038/s41377-022-01033-x
Popis: In this paper, the THz emission properties from Si wafers with different surface conditions and doping conditions have been concluded, which show the potential application of LTEM on surface estimation
Databáze: Directory of Open Access Journals
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