Surface topologies of thin aluminum films and absorbing properties of metal dielectric structures in the microwave range

Autor: Fitaev Ibraim Shevketovich, Orlenson Vulf Borisrvich, Romanets Yuri Viktorovich, Mazinov Alim Seit-Ametovich
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: ITM Web of Conferences, Vol 30, p 08013 (2019)
Druh dokumentu: article
ISSN: 2271-2097
DOI: 10.1051/itmconf/20193008013
Popis: The paper presents experimental and theoretical results on the surface topography of thin aluminum films. The ambiguous topology dynamics of the thin-film structure is represented as a function of the increase in the bulk mass of the deposited material, which leads to an occasional rise in roughness reaching its maximum at a film thickness of 7 nm. At same time on the same thickness of the conductive layer the maximum of the absorption coefficient variability is observed. A theoretical analysis of the optical coefficients depending on the size of the conductive film substantiated the existence of extremes, but at smaller thicknesses.
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