Phase-Modulated Standing Wave Interferometer

Autor: Ingo Ortlepp, Eberhard Manske, Jens-Peter Zöllner, Ivo W. Rangelow
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Proceedings, Vol 56, Iss 1, p 12 (2020)
Druh dokumentu: article
ISSN: 20200560
2504-3900
DOI: 10.3390/proceedings2020056012
Popis: Standing wave interferometers (SWIs) show enormous potential for miniaturization because of their simple linear optical set-up, consisting only of a laser source, a measuring mirror and two standing wave sensors for obtaining quadrature signals. To reduce optical influences on the standing wave and avoid the need for an exact and long-term stable sensor-to-sensor distance, a single-sensor set-up was developed with a phase modulation by forced oscillation of the measuring mirror. When the correct modulation stroke is applied, the harmonics in the sensor signal can be used for obtaining quadrature signals for phase demodulation and direction discrimination.
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