| Autor: |
Gustavo Gonçalves Dalkiranis, Pablo Ferrando-Villalba, Aitor Lopeandía-Fernández, Llibertat Abad-Muñoz, Javier Rodriguez-Viejo |
| Jazyk: |
angličtina |
| Rok vydání: |
2018 |
| Předmět: |
|
| Zdroj: |
Proceedings, Vol 2, Iss 13, p 1517 (2018) |
| Druh dokumentu: |
article |
| ISSN: |
2504-3900 |
| DOI: |
10.3390/proceedings2131517 |
| Popis: |
We show the use as a thermal photosensor of a thermoelectric (TE) microsensor based on ultrathin suspended Si films. The reduced thickness of the structural films enhances the extremely large thermal insulation of the sensing area (~43 µW/K), since phonons scatter in the surfaces, and guarantees a reduced thermal mass (in the µJ/K range). The sensitivity of the device is evaluated by heating with an argon laser (λ = 457 nm) in the range 0⁻10 mW, reaching sensitivities of around 6 × 108 V/(W·m2) in high vacuum conditions and 5 × 107 V/(W·m2) in environments of air at atmospheric pressure. Open circuit voltage measurements with and without light illumination with a 406 nm diode laser operating at 4 mW were conducted at temperature differences up to 50 K between the central hot region and the Si frame. The slight decrease of the Seebeck coefficient is related to the increase of carriers by photogeneration. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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