Silicon Micromachining for High Performance Passive Structures at W Band

Autor:	B. Guillon, K. Grenier, T. Parra, P. Pons, D. Cros, P. Blondy, J. Graffeuil, J. L. Cazaux, R. Plana
Jazyk:	angličtina
Rok vydání:	2002
Předmět:	Electrical engineering. Electronics. Nuclear engineering TK1-9971
Zdroj:	Active and Passive Electronic Components, Vol 25, Iss 1, Pp 113-122 (2002)
Druh dokumentu:	article
ISSN:	0882-7516 1563-5031
DOI:	10.1080/08827510211278
Popis:	This paper presents a micromachined technology allowing the realization of very high aspect ratio millimeter-wave circuits. Appropriate 3D electromagnetic simulations based on the finite element method have been implemented to design the circuits. Coplanar transmission lines featuring loss level in the 2 dB range up to 105 GHz have been realized. An original silicon micromachined cavity using the whispering gallery modes properties has been realized achieving a quality factor close to 10,000 range at 95 GHz.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/418ef5b9e24f423a9d55c707bb76dc4b Zobrazit plný text záznamu View record in DOAJ Plný text ve formátu PDF