| Autor: |
Reinoud F. Wolffenbuttel, Declan Winship, Yutao Qin, Yogesh Gianchandani, David Bilby, Jaco H. Visser |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Optical Materials: X, Vol 24, Iss , Pp 100348- (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2590-1478 |
| DOI: |
10.1016/j.omx.2024.100348 |
| Popis: |
Nitride-rich silicon-nitride (SiNx) is being explored for its potential as a suitable optical material for use in microsystems operating in the near-UV spectral range. Although silicon-rich SiNx is widely accepted as a CMOS-compatible dielectric and micromechanical material, its optical absorption limits application to the visible to near-IR spectral range. However, this work shows that a balance can be achieved between a sufficiently high index of refraction (n> 2) and an acceptable optical loss (k |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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