Fabricating programmed micro-defects on a line and space pattern with an ultra-low line edge roughness
| Autor: | Susumu Iida, Takayuki Uchiyama |
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| Jazyk: | angličtina |
| Rok vydání: | 2019 |
| Předmět: | |
| Zdroj: | Micro and Nano Engineering, Vol 3, Iss , Pp 44-49 (2019) |
| Druh dokumentu: | article |
| ISSN: | 2590-0072 |
| DOI: | 10.1016/j.mne.2019.03.004 |
| Popis: | Standard samples with programmed micro-defects were fabricated for evaluating the defect detection capability of the next generation of pattern inspection tools. A 1.5-nm protrusion programmed defect and a 4-nm-wide ( |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
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