| Autor: |
Ganggyu Lee, Kangchun Lee, Jinok Moon, Taeseup Song, Dong-Hee Lee, Ungyu Paik |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
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| Zdroj: |
Materials & Design, Vol 241, Iss , Pp 112935- (2024) |
| Druh dokumentu: |
article |
| ISSN: |
0264-1275 |
| DOI: |
10.1016/j.matdes.2024.112935 |
| Popis: |
We would like to respond to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, https://doi.org/10.1016/j.matdes.2016.12.066″. Mangindaan et al. raised concerns about deriving the 2nd order equations for optimizing the W-pattern CMP slurry compositions. However, we clarify that there were no errors in deriving the 2nd order equations obtained by employing response surface methodology using a face-centered design model. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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Full Text from ScienceDirect