Influence of the Low-Energy Inert-Gas Ion Bombardment on the Structure and Properties of Metallic Thin Films
| Autor: | M.O. Vasylyev, E.M. Rudenko, and S.M. Voloshko |
|---|---|
| Jazyk: | English<br />Russian<br />Ukrainian |
| Rok vydání: | 2024 |
| Předmět: | |
| Zdroj: | Успехи физики металлов, Vol 25, Iss 2, Pp 213-242 (2024) |
| Druh dokumentu: | article |
| ISSN: | 1608-1021 2617-0795 |
| DOI: | 10.15407/ufm.25.02.213 |
| Popis: | The goal of the review is to analyse the main published results of the most systematic studies of changes in the structural–phase state, the physical and chemical properties of the metallic single- and multilayer thin films’ systems after bombardment by the low-energy ( |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
|