A Glass–Ultra-Thin PDMS Film–Glass Microfluidic Device for Digital PCR Application Based on Flexible Mold Peel-Off Process

Autor: Yanming Xia, Xianglong Chu, Caiming Zhao, Nanxin Wang, Juan Yu, Yufeng Jin, Lijun Sun, Shenglin Ma
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Micromachines, Vol 13, Iss 10, p 1667 (2022)
Druh dokumentu: article
ISSN: 2072-666X
DOI: 10.3390/mi13101667
Popis: The microfluidic device (MFD) with a glass–PDMS–glass (G-P-G) structure is of interest for a wide range of applications. However, G-P-G MFD fabrication with an ultra-thin PDMS film (especially thickness less than 200 μm) is still a big challenge because the ultra-thin PDMS film is easily deformed, curled, and damaged during demolding and transferring. This study aimed to report a thickness-controllable and low-cost fabrication process of the G-P-G MFD with an ultra-thin PDMS film based on a flexible mold peel-off process. A patterned photoresist layer was deposited on a polyethylene terephthalate (PET) film to fabricate a flexible mold that could be demolded softly to achieve a rigid structure of the glass–PDMS film. The thickness of ultra-thin patterned PDMS could reach less than 50 μm without damage to the PDMS film. The MFD showcased the excellent property of water evaporation inhibition (water loss < 10%) during PCR thermal cycling because of the ultra-thin PDMS film. Its low-cost fabrication process and excellent water evaporation inhibition present extremely high prospects for digital PCR application.
Databáze: Directory of Open Access Journals