Tunable Ag Nanocavity Enhanced Green Electroluminescence from SiNx:O Light-Emitting Diode

Autor: Zongyan Zuo, Zhongyuan Ma, Tong Chen, Wenping Zhang, Wei Li, Jun Xu, Ling Xu, Kunji Chen
Jazyk: angličtina
Rok vydání: 2024
Předmět:
Zdroj: Nanomaterials, Vol 14, Iss 15, p 1306 (2024)
Druh dokumentu: article
ISSN: 2079-4991
DOI: 10.3390/nano14151306
Popis: As the driving source, highly efficient silicon-based light emission is urgently needed for the realization of optoelectronic integrated chips. Here, we report that enhanced green electroluminescence (EL) can be obtained from oxygen-doped silicon nitride (SiNx:O) films based on an ordered and tunable Ag nanocavity array with a high density by nanosphere lithography and laser irradiation. Compared with that of a pure SiNxO device, the green electroluminescence (EL) from the SiNx:O/Ag nanocavity array device can be increased by 7.1-fold. Moreover, the external quantum efficiency of the green electroluminescence (EL) is enhanced 3-fold for SiNx:O/Ag nanocavity arrays with diameters of 300 nm. The analysis of absorption spectra and the FDTD calculation reveal that the localized surface plasmon (LSP) resonance of size-controllable Ag nanocavity arrays and SiNx:O films play a key role in the strong green EL. Our discovery demonstrates that SiNx:O films coupled with tunable Ag nanocavity arrays are promising for silicon-based light-emitting diode devices of the AI period in the future.
Databáze: Directory of Open Access Journals