Enhanced sputtering of Ge nanowires under synergetic effect of Mn ion and electron beams

Autor: L. Vincent, M. Fakhfakh, G. Patriarche, C. Renard, D. Bouchier
Jazyk: angličtina
Rok vydání: 2017
Předmět:
Zdroj: Results in Physics, Vol 7, Iss , Pp 3813-3814 (2017)
Druh dokumentu: article
ISSN: 2211-3797
DOI: 10.1016/j.rinp.2017.10.005
Popis: To monitor the damage evolution in Ge nanowires during Mn implantation, in situ transmission electron microscopy observations were carried-out as a function of the Mn fluence. Special interest lies in the sputtering of nanowires. We evidence an enhanced sputtering under the synergetic effects of Mn implantation and electron beam which may alert experimenters to some possible artefacts related to in situ observations in the case of nanostructures.
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