Pulse Laser Sulfur-Hyperdoping of Germanium and High Quantum Efficiency Photodiodes

Autor: Keye Sun, Mool C. Gupta
Jazyk: angličtina
Rok vydání: 2016
Předmět:
Zdroj: IEEE Photonics Journal, Vol 8, Iss 5, Pp 1-10 (2016)
Druh dokumentu: article
ISSN: 1943-0655
DOI: 10.1109/JPHOT.2016.2611444
Popis: Germanium was successfully hyperdoped with sulfur by means of nanosecond pulse laser and SF6 gas. A photodiode was fabricated based on sulfur-hyperdoped germanium. Rectifying current-voltage characteristics were observed for the device. The sulfur-hyperdoped germanium photodiode showed an internal quantum efficiency close to 150% from visible to near infrared and increased to 275% for the ultraviolet region. The -3 dB bandwidth was measured to be 20 MHz. Sulfur was demonstrated to be an effective deep level dopant for realizing high-performance germanium photodiodes.
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