Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass

Autor: Frederik Kotz, Patrick Risch, Karl Arnold, Semih Sevim, Josep Puigmartí-Luis, Alexander Quick, Michael Thiel, Andrei Hrynevich, Paul D. Dalton, Dorothea Helmer, Bastian E. Rapp
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: Nature Communications, Vol 10, Iss 1, Pp 1-7 (2019)
Druh dokumentu: article
ISSN: 2041-1723
DOI: 10.1038/s41467-019-09497-z
Popis: Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass by sacrificial template replication.
Databáze: Directory of Open Access Journals