Infrared metamaterial by RF magnetron sputtered ZnO/Al:ZnO multilayers

Autor: Kevin C. Santiago, Rajeh Mundle, Curtis White, Messaoud Bahoura, Aswini K. Pradhan
Jazyk: angličtina
Rok vydání: 2018
Předmět:
Zdroj: AIP Advances, Vol 8, Iss 3, Pp 035011-035011-7 (2018)
Druh dokumentu: article
ISSN: 2158-3226
DOI: 10.1063/1.5024900
Popis: Hyperbolic metamaterials create artificial anisotropy using metallic wires suspended in dielectric media or alternating layers of a metal and dielectric (Type I or Type II). In this study we fabricated ZnO/Al:ZnO (AZO) multilayers by the RF magnetron sputtering deposition technique. Our fabricated multilayers satisfy the requirements for a type II hyperbolic metamaterial. The optical response of individual AZO and ZnO films, as well as the multilayered film were investigated via UV-vis-IR transmittance and spectroscopic ellipsometry. The optical response of the multilayered system is calculated using the nonlocal-corrected Effective Medium Approximation (EMA). The spectroscopic ellipsometry data of the multilayered system was modeled using a uniaxial material model and EMA model. Both theoretical and experimental studies validate the fabricated multilayers undergo a hyperbolic transition at a wavelength of 2.2 μm. To our knowledge this is the first AZO/ZnO type II hyperbolic metamaterial system fabricated by magnetron sputtering deposition method.
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