Surface and thickness measurement in the Targetlab of GSI

Autor: Kindler Birgit, Celik Ayik Elif, Hübner Annett, Lommel Bettina, Steiner Jutta, Yakusheva Vera
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: EPJ Web of Conferences, Vol 229, p 02002 (2020)
Druh dokumentu: article
ISSN: 2100-014X
DOI: 10.1051/epjconf/202022902002
Popis: For characterization of targets and foils prepared at the target laboratory as well as for characterization of e.g. degrader or windows of internal customers, different analytical devices are available. Besides a lot of standard equipment, the target laboratory of GSI holds a 3D-measurement system (MicroProf®) equipped with optical sensors for measuring surface parameters as well as total thickness variations contact-free. In the paper the measuring principle including the possibilities and features of the MicroProf®-system are explained and some different applications are shown.
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