| Autor: |
Yiming Fang, Zhen Yang, Chengdong Li, Peipeng Xu, Kunlun Yan, Yan Sheng, Haizheng Tao, Rongping Wang |
| Jazyk: |
angličtina |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
AIP Advances, Vol 11, Iss 6, Pp 065303-065303-6 (2021) |
| Druh dokumentu: |
article |
| ISSN: |
2158-3226 |
| DOI: |
10.1063/5.0045684 |
| Popis: |
We have successfully fabricated a dispersion engineered ZnSe waveguide. The ZnSe film was deposited on a CaF2 substrate by radio frequency magnetron sputtering, and the waveguide was patterned directly on the ZnSe films by UV lithography and inductively coupled plasma etching. The nonlinear coefficient in the 4-μm-width waveguide was calculated to be 0.73 w−1 m−1 for both TE and TM modes at 1.55 µm. The loss of the ZnSe rib waveguides was measured to be 4.3 dB/cm at 1550 nm using the cut-back method. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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