| Autor: |
Balogh-Michels Zoltán, Stevanovic Igor, Frison Ruggero, Bächli Andreas, Schachtler Daniel, Gischkat Thomas, Neels Antonia, Stuck Alexander, Botha Roelene |
| Jazyk: |
angličtina |
| Rok vydání: |
2020 |
| Předmět: |
|
| Zdroj: |
EPJ Web of Conferences, Vol 238, p 12004 (2020) |
| Druh dokumentu: |
article |
| ISSN: |
2100-014X |
| DOI: |
10.1051/epjconf/202023812004 |
| Popis: |
We present our investigation on the crystallization of IBS HfO2 on (0001) SiO2. The crystallization was studied by in-situ XRD. The activation energy was 2.6±0.5 eV. The growth follows a two-dimensional mode. LIDT measurements (5000-on-1) with 10 ns pulses at 355 nm on 3QWT HfO2 layers shows that the crystallization leads to increase of the laser irradiation resistance. The 0%-LIDT of the as coated sample was 3.1 J/cm2 and increased to 3.7 J/cm2 after 5h @ 500°C. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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