| Autor: |
N. V. Leonovich, P. D. Tovt, D. A. Kotov |
| Jazyk: |
ruština |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 21, Iss 4, Pp 33-39 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
1729-7648 |
| DOI: |
10.35596/1729-7648-2023-21-4-33-39 |
| Popis: |
A developed technological reactor for the formation of a diamond-like carbon coating on substrates up to 200 mm in diameter by chemical vapor deposition in high-density inductively coupled plasma at an operating pressure below 5 Pa is described. The results of experimental studies on obtaining a diamond-like carbon coating in the developed reactor are presented. The dependences of the rate of deposition of a diamond-like carbon coating on the power of the RF discharge, the operating pressure, and the consumption of the film-forming gaseous reagent have been established. Also, for the developed technological reactor, the modes for obtaining diamond-like carbon coatings with the best mechanical properties were established with the following process parameters: RF power 600–900 W, precursor gas flow rate 15–50 cm3/min, the ratio of plasma-forming gas volumes to film-forming gas volume 3:1 at a residual pressure in the working chamber of not more than 4 Pa. It has been shown by Raman spectroscopy that the coatings obtained under efficient conditions contain a significant amount of a diamond-like phase. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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