| Autor: |
Hanju Lee, Zhirayr Baghdasaryan, Barry Friedman, Kiejin Lee |
| Jazyk: |
angličtina |
| Rok vydání: |
2019 |
| Předmět: |
|
| Zdroj: |
IEEE Access, Vol 7, Pp 42201-42209 (2019) |
| Druh dokumentu: |
article |
| ISSN: |
2169-3536 |
| DOI: |
10.1109/ACCESS.2019.2907013 |
| Popis: |
We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substrate of ITO-glass. By using a conventional polarized microscope with microwave irradiation (6 ~ 15 GHz), we show that the present method provides a non-contact and non-destructive way to inspect an electrical defect of a transparent conductive thin film with a minimum detectable defect length of 1 mm and a parallel sensing of electrical defects distributed in a 40 mm by 30 mm area. The high resolution and wide field of view of the present method are attractive features for the practical application of this inspection technology. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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