A Study on Selectivity and Temperature Coefficients of the Chloride Ion Sensors With RuOx Thin Film

Autor: Shi-Chang Tseng, Tong-Yu Wu, Jung-Chuan Chou, Yi-Hung Liao, Chih-Hsien Lai, Jian-Syun Chen, Min-Siang Huang, Siao-Jie Yan, Si-Hong Lin
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: IEEE Journal of the Electron Devices Society, Vol 7, Pp 140-149 (2019)
Druh dokumentu: article
ISSN: 2168-6734
DOI: 10.1109/JEDS.2018.2886300
Popis: This paper investigated the response time, chloride selectivity, and temperature coefficients of the arrayed flexible ruthenium oxide chloride ion sensor in sodium chloride (NaCl) solutions with concentrations from 10-5 M to 1 M. The response time was 7 s in 1 M NaCl solution at room temperature, showing that the sensor had the characteristics of the fast response. The selectivity coefficients of the SO42- ion, NO3- ion, CO32- ion, ClO- ion, and ClO4- ion were 0.001, 0.056, 0.004, 0.015, and 0.006, respectively. The chloride ion sensing device had the good chloride selectivity. Finally, the sensitivity was investigated with different solution temperatures from 5 °C to 50 °C. The sensitivity was increased with higher solution temperature. The temperature coefficient of the sensitivity of the chloride ion sensing device was approximately 0.681 mV/pCl °C between 5 °C and 35 °C.
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