Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates
| Autor: | M. Rohland, U. Arz, K. Kuhlmann, S. Büttgenbach |
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| Jazyk: | German<br />English |
| Rok vydání: | 2012 |
| Předmět: | |
| Zdroj: | Advances in Radio Science, Vol 10, Pp 13-18 (2012) |
| Druh dokumentu: | article |
| ISSN: | 1684-9965 1684-9973 |
| DOI: | 10.5194/ars-10-13-2012 |
| Popis: | We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-wafer probing and provides less than −10 dB measured reflection in the frequency range from 1 to 110 GHz. Measured and calculated values of the propagation constant of the membrane CPW agree well in the entire frequency range. |
| Databáze: | Directory of Open Access Journals |
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