| Autor: |
Roman Kornev, Igor Gornushkin, Lubov Shabarova, Alena Kadomtseva, Georgy Mochalov, Nikita Rekunov, Sergey Romanov, Vitaly Medov, Darya Belousova, Nikita Maleev |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
Sci, Vol 6, Iss 1, p 1 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2413-4155 |
| DOI: |
10.3390/sci6010001 |
| Popis: |
The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of high-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes are investigated. The main gas-phase and solid products of plasma-chemical transformations are determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems for optimal process parameters was carried out. Using the example of hydrogen reduction of SiCl4 by the method of numerical modeling, gas-dynamic and thermal processes for this type of discharge are investigated. The impurity composition of gas-phase and solid reaction products is investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, is shown. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
|
|
Nepřihlášeným uživatelům se plný text nezobrazuje |
K zobrazení výsledku je třeba se přihlásit.
|
