Monolithic integration of GaAs p–i–n photodetectors grown on 300 mm silicon wafers

Autor: H. Mehdi, M. Martin, S. David, J. M. Hartmann, J. Moeyaert, M. L. Touraton, C. Jany, L. Virot, J. Da Fonseca, J. Coignus, D. Blachier, T. Baron
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: AIP Advances, Vol 10, Iss 12, Pp 125204-125204-6 (2020)
Druh dokumentu: article
ISSN: 2158-3226
DOI: 10.1063/5.0030677
Popis: Vertical GaAs p–i–n photodetectors epitaxially grown on GaAs(001), Ge/Si(001), and Si(001) substrates are reported. The performances of such photodetectors were investigated as a function of threading dislocation density in the stacks. A low dark current at room temperature, below 100 pA up to −9 V for all photodetectors, was evidenced. The absorption coefficients of GaAs were extracted from the spectral response of those p–i–n structures between 400 nm and 1100 nm. A responsivity of 0.17 A/W at 850 nm was obtained for a GaAs p–i–n structure grown directly on Si as compared to the value of 0.23 A/W obtained for the GaAs substrate. Such responsivity shows that III–V integration on Si is an efficient way of fabricating high performance optical sensors with low cost large scale productivity.
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