A microscope image processing method for analyzing TLIPSS structures

Autor:	Dmitrij Belousov, Alexander Dostovalov, Victor Korolkov, Sergey Mikerin
Jazyk:	English<br />Russian
Rok vydání:	2019
Předmět:	digital image processing microscope image processing laser materials processing laser-induced periodic surface structures Information theory Q350-390 Optics. Light QC350-467
Zdroj:	Компьютерная оптика, Vol 43, Iss 6, Pp 936-945 (2019)
Druh dokumentu:	article
ISSN:	2412-6179 0134-2452
DOI:	10.18287/2412-6179-2019-43-6-936-945
Popis:	The paper describes a method for processing microimages of thermochemical laser-induced periodic surface structures (TLIPSS) to quantify their structural order and defects. Results of its application for the analysis of microimages of periodic structures formed in 30-nm chromium films by an astigmatically focused femtosecond Gaussian laser beam have been presented. Dependences of the relative area of the beam-modified region, the area of defects, and the ordering of the periodic structures on the scanning speed and the writing beam power have been obtained.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/ce247a111cf54725834d8f7763c6246d Zobrazit plný text záznamu View record in DOAJ