ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

Autor: Izabela Constantinoiu, Cristian Viespe
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Sensors, Vol 20, Iss 18, p 5118 (2020)
Druh dokumentu: article
ISSN: 1424-8220
DOI: 10.3390/s20185118
Popis: Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.
Databáze: Directory of Open Access Journals
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