| Autor: |
Huaiyu Cui, Zhiyuan Wang, Shan Wu, Haojie An, Jinshi Wang, Yongpeng Zhao |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
Photonics, Vol 10, Iss 6, p 629 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2304-6732 |
| DOI: |
10.3390/photonics10060629 |
| Popis: |
A capillary discharge extreme ultraviolet laser is focused and wavefront split at 46.9 nm by a tubular optical element. The reflectivity at 46.9 nm is both simulated and measured to be higher than 90% with a slight optical aberration. The operating principle of the tubular element for focusing and wavefront splitting is discussed. Dense and intense grating-like fringes with a period of ~150 nm are achieved. The method used in this work allows nano-scale processing with extreme ultraviolet laser at single-shot exposure mode. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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