High Resistivity and High Mobility in Localized Beryllium-Doped InAlAs/InGaAs Superlattices Grown at Low Temperature

Autor: Deyan Dai, Hanqing Liu, Xiangbin Su, Xiangjun Shang, Shulun Li, Haiqiao Ni, Zhichuan Niu
Jazyk: angličtina
Rok vydání: 2023
Předmět:
Zdroj: Crystals, Vol 13, Iss 10, p 1417 (2023)
Druh dokumentu: article
ISSN: 2073-4352
DOI: 10.3390/cryst13101417
Popis: InAlAs:Be/InGaAs superlattices grown at low temperatures were investigated in this study. To obtain the highest resistivity and mobility simultaneously, a growth temperature above 200 °C was applied. The electrical properties were conducted via Hall effect measurement and a photoresponse test. The experimental results demonstrate that the sample grown at 257.5~260 °C exhibits the highest resistivity (1290 Ω × cm) and lowest carrier concentration (3.18 × 1014 cm−3), along with the highest mobility (187.2 cm2/Vs). Furthermore, the highest photoresponse (1.21) relative to dark resistivity was obtained under 1500 nm excitation. The optimized growth parameter of InGaAs/InAlAs multilayered structures is of great significance for fabricating high-performance terahertz photoconductive semiconductor antennas.
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