| Autor: |
Masato Higuchi, Dong Wei, Masato Aketagawa |
| Jazyk: |
angličtina |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
Measurement: Sensors, Vol 18, Iss , Pp 100336- (2021) |
| Druh dokumentu: |
article |
| ISSN: |
2665-9174 |
| DOI: |
10.1016/j.measen.2021.100336 |
| Popis: |
In this presentation, the displacement measurement system using sinusoidal phase modulation interferometer and modified phase-locked loop is discussed. The modified phase-locked loop is specially developed phase-locked loop for sinusoidal phase modulation interferometer for improving the resolution. The 0.1 nm step displacement with 1 Hz results that the current resolution of the system is less than sub-nano meter order. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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