| Autor: |
Matthias Bernien, Martin Götz, Claus Illgen, Dietmar Drung, Christian Krause, Thomas Bock, Karl Jousten |
| Jazyk: |
angličtina |
| Rok vydání: |
2021 |
| Předmět: |
|
| Zdroj: |
Measurement: Sensors, Vol 18, Iss , Pp 100202- (2021) |
| Druh dokumentu: |
article |
| ISSN: |
2665-9174 |
| DOI: |
10.1016/j.measen.2021.100202 |
| Popis: |
A novel ionization gauge was developed where the electron beam is guided through the ionization space in a straight path. This design was chosen in order to develop a more stable ionization vacuum gauge suitable as reference standard in the range of 10−6 Pa to 10−2 Pa. The design requires a low electron current resulting in even lower ion currents. For the purpose of a reference standard, these ultra-low currents in the range 1 pA–100 nA need to be measured in a traceable manner. For the first time, an ultrastable low-noise current amplifier was used for this purpose. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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