Periodic Multilayer for X-ray Spectroscopy in the Li K Range

Autor: Vladimir Polkonikov, Nikolai Chkhalo, Roman Pleshkov, Angelo Giglia, Nicolas Rividi, Emmanuelle Brackx, Karine Le Guen, Iyas Ismail, Philippe Jonnard
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: Applied Sciences, Vol 11, Iss 14, p 6385 (2021)
Druh dokumentu: article
ISSN: 2076-3417
DOI: 10.3390/app11146385
Popis: X-ray spectroscopy of lithium is very difficult, even impossible, with wavelength dispersive spectrometers commonly deployed on scanning electron microscopes or electron microprobe analyzers. This is due to the absence of crystals and lack of efficient periodic multilayer for this spectral range, around 50 eV. To address this issue, we propose using a Be/Si/Al multilayer having a period of about 29 nm. The multilayer was deposited by magnetron sputtering and its reflectivity measured as a function of the glancing angle in the spectral range of the Li K emission and as a function of the incident energy up to ~200 eV. This characterization demonstrates that the designed multilayer is suitable to efficiently perform spectroscopy in the range of the Li K emission in terms of reflectance (0.32 at 51.5 eV), bandwidth (around 3.5 eV) and rejection of high order diffracted radiation.
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