Biocompatible Co-organic Composite Thin Film Deposited by VHF Plasma-Enhanced Atomic Layer Deposition at a Low Temperature
| Autor: | Won Kyun Yeom, Jin Woong Lee, Jin-A Bae, Da In Sung, Taeyeop Kim, Jung Heon Lee, Geun Young Yeom |
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| Jazyk: | angličtina |
| Rok vydání: | 2024 |
| Předmět: | |
| Zdroj: | ACS Omega, Vol 9, Iss 31, Pp 33735-33742 (2024) |
| Druh dokumentu: | article |
| ISSN: | 2470-1343 |
| DOI: | 10.1021/acsomega.4c02845 |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
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