Nanofabrication for all-soft and high-density electronic devices based on liquid metal

Autor: Min-gu Kim, Devin K. Brown, Oliver Brand
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Nature Communications, Vol 11, Iss 1, Pp 1-11 (2020)
Druh dokumentu: article
ISSN: 2041-1723
DOI: 10.1038/s41467-020-14814-y
Popis: Though all-soft electronic devices with liquid metals are attractive due to the material’s compatibility with patterning methods, obtaining sub-micron patterns remains a challenge. Here, the authors report a hybrid lithography process to realize all-soft submicron-scale devices based on EGaIn.
Databáze: Directory of Open Access Journals