| Autor: |
Inho Seong, Sijun Kim, Woobeen Lee, Youngseok Lee, Chulhee Cho, Wonnyoung Jeong, Minsu Choi, Byeongyeop Choi, Huichan Seo, Sangheon Song, Shinjae You |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
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| Zdroj: |
Applied Physics Express, Vol 17, Iss 9, p 096001 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
1882-0786 |
| DOI: |
10.35848/1882-0786/ad7667 |
| Popis: |
A global model (GM) assumes ion energy ( $\varepsilon $ ) on the electrode equals the time-averaged sheath voltage ( ${\left\langle {V}_{{\rm{sh}}}\left(t\right)\right\rangle }_{t}$ ). However, using particle-in-cell simulation, we found that $\varepsilon $ differs from ${\left\langle {V}_{{\rm{sh}}}\left(t\right)\right\rangle }_{t}.$ We propose a unified global model (UGM) that calculates $\varepsilon $ and collisional energy losses of ions by employing plasma circuit and sheath models, accompanied by a voltage and current sensor. We compared the results of the UGM with the experimental measurements and the results revealed that UGM is closer to the experiment than GM. UGM shows a linear relationship with the experiment, indicating that the UGM is applicable for plasma monitoring. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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