| Autor: |
Qing Yu, Guoxiang Fan, Wei Ren, Qingqing Fan, Jinming Ti, Junhong Li, Chenghao Wang |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
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| Zdroj: |
Micromachines, Vol 13, Iss 10, p 1597 (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2072-666X |
| DOI: |
10.3390/mi13101597 |
| Popis: |
We proposed a PZT-film-based piezoelectric micromachined ultrasonic transducer (pMUT) with an I-shaped composite diaphragm to improve the sensitivity and resonant frequency of pMUTs with the same diaphragm area. The finite element method (FEM) simulation results indicated that the pMUT with an I-shaped composite diaphragm had relatively high sensitivity and resonant frequency. The pMUT with an I-shaped diaphragm had a 36.07% higher resonant frequency than a pMUT with a circular diaphragm. The pMUT with an I-shaped diaphragm had a 3.65 dB higher loop gain (loss) than a pMUT with a rectangular diaphragm. The piezoelectric layer thickness of the pMUT with an I-shaped composite diaphragm was then optimized. Maximum loop gain (loss) was reached when the piezoelectric layer thickness was 8 μm. The pMUT with an I-shaped composite diaphragm was fabricated using the MEMS method, and its performance was evaluated. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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