Thin film growth and mechanical properties of CrFeCoNi/TiNbZrTa multilayers

Autor: Smita G. Rao, Rui Shu, Siyang Wang, Robert Boyd, Finn Giuliani, Arnaud le Febvrier, Per Eklund
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Materials & Design, Vol 224, Iss , Pp 111388- (2022)
Druh dokumentu: article
ISSN: 0264-1275
DOI: 10.1016/j.matdes.2022.111388
Popis: Multilayers of high entropy alloys (HEA) are picking up interest due to the possibility of altering material properties by tuning crystallinity, thickness, and interfaces of the layers. This study investigates the growth mechanism and mechanical properties of CrFeCoNi/TiNbZrTa multilayers grown by magnetron sputtering. Multilayers of bilayer thickness (Λ) from 5 nm to 50 nm were grown on Si(100) substrates. Images taken by transmission electron microscopy and energy-dispersive X-ray spectroscopy mapping revealed that the layers were well defined with no occurrence of elemental mixing. Multilayers with Λ
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