PHOTOLITHOGRAPHY OF FILM STRUCTURES XEROGEL/POROUS ANODIC ALUMINA PREPARED IN VARIOUS ELECTROLYTES

Autor: L. S. Khoroshko, A. M. Asharif, T. I. Orekhovskaya, M. V. Meledina, V. A. Sokol, B. S. Kolosnitsin, N. V. Gaponenko
Jazyk: ruština
Rok vydání: 2019
Předmět:
Zdroj: Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 0, Iss 3, Pp 101-105 (2019)
Druh dokumentu: article
ISSN: 1729-7648
Popis: The results of study the morphology of the microstructured porous anodic alumina films formed using electrochemical anodization, sol-gel synthesis, photolithography and chemical etching are given. The metal mask was not used in photolithography, because of fabrication the continuous xerogel film. The perspective of application of these structures in planar optoelectronics and photocatalyses are discussed.
Databáze: Directory of Open Access Journals