| Autor: |
Jingwen Hu, Zhen-Ze Li, Yang-Yang Zhao, Yi-Shi Xu, Lin Wang, Molong Han, Lachlan Hyde, Soon Hock Ng, Lei Wang, Saulius Juodkazis |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
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| Zdroj: |
Nanomaterials, Vol 12, Iss 22, p 4092 (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2079-4991 |
| DOI: |
10.3390/nano12224092 |
| Popis: |
For constructing optical and electrical micro-devices, the deposition/printing of materials with sub-1 μm precision and size (cross-section) is required. Crystalline c-ITO (indium tin oxide) nanostructures were patterned on glass with sufficient precision to form 20–50 nm gaps between individual disks or lines of ∼250 nm diameter or width. The absorbed energy density [J/cm3] followed a second-order dependence on pulse energy. This facilitated high-resolution and precise nanoscale laser-writing at a laser wavelength of 515 nm. Patterns for optical elements such as circular gratings and micro-disks were laser-printed using ITO as a resist. Unexposed amorphous a-ITO was chemically removed in aqueous 1% vol. HF solution. This use of a-ITO as a solid resist holds promise for metamaterial and micro-optical applications. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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