On the Lateral Instability Analysis of MEMS Comb-Drive Electrostatic Transducers

Autor: Binh Duc Truong, Cuong Phu Le, Einar Halvorsen
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: Sensors, Vol 19, Iss 17, p 3770 (2019)
Druh dokumentu: article
ISSN: 1424-8220
DOI: 10.3390/s19173770
Popis: This paper investigates the lateral pull-in effect of an in-plane overlap-varying transducer. The instability is induced by the translational and rotational displacements. Based on the principle of virtual work, the equilibrium conditions of force and moment in lateral directions are derived. The analytical solutions of the critical voltage, at which the pull-in phenomenon occurs, are developed when considering only the translational stiffness or only the rotational stiffness of the mechanical spring. The critical voltage in a general case is numerically determined by using nonlinear optimization techniques, taking into account the combined effect of translation and rotation. The influences of possible translational offsets and angular deviations to the critical voltage are modeled and numerically analyzed. The investigation is then expanded for the first time to anti-phase operation mode and Bennet’s doubler configuration of the two transducers.
Databáze: Directory of Open Access Journals
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