X-ray mirrors with sub-nanometre figure errors obtained by differential deposition of thin WSi2 films
| Autor: | Patrice Bras, Christian Morawe, Sylvain Labouré, François Perrin, Amparo Vivo, Raymond Barrett |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | Journal of Synchrotron Radiation, Vol 30, Iss 4, Pp 708-716 (2023) |
| Druh dokumentu: | article |
| ISSN: | 1600-5775 16005775 |
| DOI: | 10.1107/S1600577523003697 |
| Popis: | Differential deposition by DC magnetron sputtering was applied to correct for figure errors of X-ray mirrors to be deployed on low-emittance synchrotron beamlines. During the deposition process, the mirrors were moved in front of a beam-defining aperture and the required velocity profile was calculated using a deconvolution algorithm. The surface figure was characterized using conventional off-line visible-light metrology instrumentation (long trace profiler and Fizeau interferometer) before and after the deposition. WSi2 was revealed to be a promising candidate material since it conserves the initial substrate surface roughness and limits the film stress to acceptable levels. On a 300 mm-long flat Si mirror the average height errors were reduced by a factor of 20 down to 0.2 nm root mean square. This result shows the suitability of WSi2 for differential deposition. Potential promising applications include the upgrade of affordable, average-quality substrates to the standards of modern synchrotron beamlines. |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
|