Observation of the crystalline orientation dependence of the semiconductor–metal transition for thermal oxidation induced VO2 films over amorphous quartz glasses

Autor: Mengtao Gong, Fei Huang, Shouqin Tian, Xiujian Zhao, Baoshun Liu
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: AIP Advances, Vol 11, Iss 12, Pp 125232-125232-7 (2021)
Druh dokumentu: article
ISSN: 2158-3226
DOI: 10.1063/5.0074628
Popis: Polycrystalline VO2 films were obtained through a vacuum annealing of sputtered V-rich films over quartz substrates and were characterized with x-ray diffraction, field-emission scanning electron microscopy, and x-ray photoelectron spectroscopy, respectively. The semiconductor–metal transition (SMT) was studied with the temperature-variable electric resistances. It was seen that the VO2 film crystalline orientation changes with the O2 partial pressure during the vacuum annealing. We observed a relation between the thermal hysteresis of the SMT and the crystalline orientation of the monoclinic VO2 films. The (011) oriented monoclinic film presents a narrower thermal hysteresis and a larger transition amplitude as compared to the (200) orientated films. In addition, a transition shoulder appears in the thermal hysteresis of the SMT for the (200) oriented VO2 films during the cooling process and becomes absent for the (011) orientated VO2 films.
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