Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors
| Autor: | J. Bardong, A. Binder, S. Toskov, G. Miskovic, G. Radosavljevic |
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| Jazyk: | angličtina |
| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | Journal of Sensors and Sensor Systems, Vol 5, Iss 1, Pp 85-93 (2016) |
| Druh dokumentu: | article |
| ISSN: | 2194-8771 2194-878X |
| DOI: | 10.5194/jsss-5-85-2016 |
| Popis: | Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600 °C. The devices showed promising results up to 450 °C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles. |
| Databáze: | Directory of Open Access Journals |
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