V-Band End-Fire Radiating Planar Micromachined Helical Antenna Using Through-Glass Silicon Via (TGSV) Technology

Autor: Aqeel Hussain Naqvi, Jeong-Heum Park, Chang-Wook Baek, Sungjoon Lim
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: IEEE Access, Vol 7, Pp 87907-87915 (2019)
Druh dokumentu: article
ISSN: 2169-3536
DOI: 10.1109/ACCESS.2019.2925073
Popis: In this paper, we demonstrate a V-band planar micromachined helical antenna (PHA) with end-fire radiation on the glass substrate. The planar rectangular helical configuration is realized using the novel through-glass silicon via (TGSV) technology. The proposed micromachined antenna is designed and fabricated on a borosilicate glass substrate of thickness 350 μm, which has a very low-dielectric loss compared to silicon at millimeter-wave bands. The proposed PHA is fed by a microstrip line, and the planar helical configuration with 3.25 turns with a truncated ground plane is designed for achieving wideband end-fire radiation with seven tungsten-coated silicon vias and six connected gold arm patterns, which are fabricated using the TGSV technology. The electrical length of the proposed antenna is (3 λo ×1.4 λo). The designed antenna operates at the center frequency of 58 GHz. A prototype of the proposed antenna is fabricated by micromachining technology and tested. The simulated and measured results show that the proposed antenna has a wide operational bandwidth of 50.3 to 65 GHz for |S11|
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