| Autor: |
V. K. Ravikumar, Jiann Min Chin, Winson Lua, Nathan Linarto, Gopinath Ranganathan, Jonathan Trisno, K. L. Pey, Joel K. W. Yang |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
Nature Communications, Vol 13, Iss 1, Pp 1-8 (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2041-1723 |
| DOI: |
10.1038/s41467-022-32724-z |
| Popis: |
Laser probing of integrated circuits using sub-bandgap photon energies remains a challenge. Here, the authors propose a super-resolution method capable of achieving probe placement accuracy to better than 10 nm; extraction of electro-optic waveforms from a node of a group of transistors and applied this to isolate and identify a fault on a defective device. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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Full text from SpringerLink