High-precision optical fiber pressure sensor using frequency-modulated continuous-wave laser interference

Autor: Lang Bai, Gang Zheng, Bin Sun, Xiongxing Zhang, Qiming Sheng, Yuan Han
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: AIP Advances, Vol 11, Iss 2, Pp 025038-025038-8 (2021)
Druh dokumentu: article
ISSN: 2158-3226
DOI: 10.1063/5.0035643
Popis: This work presents a high-precision fiber optic pressure sensor based on frequency-modulated continuous-wave (FMCW) laser interference. The pressure sensor is primarily composed of a diaphragm-type Fabry–Pérot (F–P) cavity, with the diaphragm fabricated using high-elasticity SUS631 stainless steel. The external air pressure causes the center of the elastic diaphragm to deform, and this deformation results in a change in the F–P cavity length. The FMCW laser-interference method was used to demodulate the change in the length of the cavity and realize high-precision pressure measurements. The experimental results showed that when the pressure measurement is in the range of 0 kPa–600 kPa, an accuracy of 3.8 Pa can be obtained. In addition, the sensor had very good linearity with pressure change (R2 = 0.999 94), repeatability, and stability.
Databáze: Directory of Open Access Journals